General Information and Usage:
The Solitec spinner is used for depositing a uniform layer of a material
on a wafer. It can be used for photoresist or other materials.
Equipment Specifications:
Variable speed up to 6000rpm
Supports substrates up to 9" in diameter
General Operating Information
To use the spinner, the house vacuum must be on.
Special care should be taken when using SU-8. It is not good if it gets all over.
Also take care that nothing can go down the opening for the chuck or else the inner workings
can get messed up.
Operating Instructions
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To start out, the switches should all be in the off position. The speed
knob should be at zero.
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Cleanroom wipes should be placed around the bowl of the spinner to help keep
it clean.
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Use the metal wafer holder to position the wafer on the chuck. There is a groove
in it so it can slide under the chuck in order to center the wafer on the chuck. |
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When the wafer is in position, switch on the vacuum and carefully slide out
the wafer holder. |
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Switch on the power and the motor for the spinner. |
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Also turn on the control box above the spinner.
It will display a number indicating the speed of the spinner.
The number displayed must be multiplied by five to obtain the actual speed. |
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Apply the desired material to the wafer and turn the speed control to the proper speed.
When finished, turn the speed knob to zero and the other switches to the off position.
Also remember to turn off the power of the box above. |
